Customized, e-beam lithography-based wafer fabrication in the shared clean room of the Fraunhofer IOF Jena, 2018.
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Z3 – Nanostructure technologies

Customized, e-beam lithography-based wafer fabrication in the shared clean room of the ...
Image: Jan-Peter Kasper/FSU

A strong cornerstone of NOA is formed by its excellent research infrastructure concerning nanostructure technologies. These state-of-the-art technologies and facilities are available for all individual research projects of the CRC and their scientific goals by providing the service project Z3.

Principal investigator

Prof. Uwe Zeitner
Institute of Applied Physics
Albert-Einstein-Str. 15
07745 Jena
Phone
+49 3641 9-47830
Postal address:
Max-Wien-Platz 1
07743 Jena
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